Hexamethyldisilazane, commonly known as HMDS, is an organosilicon compound with the chemical formula [(CH3)3Si]2NH. It’s a colorless, volatile liquid with a pungent odor, used in various industrial and laboratory settings. HMDS acts as a precursor in chemical vapor deposition and as a silylating agent, particularly in photolithography and electron microscopy.It is also used as an adhesion promoter in semiconductor manufacturing.
